Program Chair
- Gregory Parsons, North Carolina State University, USA
Organizing Committee
- Annelies Delabie, IMEC, Belgium (ASD 2016 Chair)
- Dennis Hausmann, Lam Research, USA
- Adrie Mackus, Eindhoven University of Technology, The Netherlands (ASD 2017 Chair)
- Gregory Parsons, North Carolina State University, USA (ASD 2018 Chair)
Program Committee
- Stacey Bent, Stanford University, USA
- Robert Clark, TEL, USA
- Annelies Delabie, IMEC, Belgium (ASD 2016 Chair)
- John Ekerdt, University of Texas at Austin, USA
- Dennis Hausmann, Lam Research, USA
- Rami Hourani, Intel, USA
- Ravi Kanjolia, EMD Performance Materials, USA
- Erwin Kessels, Eindhoven University of Technology, The Netherlands
- Han Jin Lim, Samsung Electronics, South Korea
- Adrie Mackus, Eindhoven University of Technology, The Netherlands (ASD 2017 Chair)
- Jan Willem Maes, ASM Corporate R&D, USA
- Soley Ozer, Intel, USA
- Gregory Parsons, North Carolina State University, USA (ASD 2018 Chair)
- Mark Saly, Applied Materials, USA